EXELAN 8"(N) SUPER DENSE CERAMIC PLATE
Product Detail
Robust and Re-usable Coulombic ESC, made from ultra high-density ceramic plates in Al2O3 replaces the OEM Johnson Rahbeck ESC which uses a TiO2 glued plate. This new Temnest ESC has much better chucking and dechucking performance, and can be recycled and repaired when eventually required. This means much better Cost of Ownership. Coulombic technology means no wafer sticking problems and no requirement for dechuck edge lift pins. The super dense ceramic plates provide very long life-time and the highest breakdown voltage strength.
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